| n2STAR-2023-EQUIPMENT INFRASTRUCTURE & HOURLY CHARGES |
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| Mask Aligner (EVG 620NT) |
₺ 1,200.00 |
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Maskless Lithography and Mask Pattern Generator System (Heidelberg DWL 66+ Direct Writing Lithography System) |
₺ 1,600.00 |
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Wet Bench 3 for Automatic PR Spin Coating, Automatic Spin Developer stations, Pre-bake / Post-bake Hot plates, Chill Plate (Arias & Suss) |
₺ 500.00 |
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Wet Bench 8 for Wet Processing of Mask Patterning (Developer, Chrome Etchant, PR Remover, Quick Dump Rinser (QDR), Mask rinser/dryer) (Arias) |
₺ 500.00 |
| Asher / Oxygen Plasma (Diener Atto) |
₺ 800.00 |
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Spectroscopic Reflectometer (Filmetrics F20) |
₺ 500.00 |
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11. Fume Hood 1 with Manual PR Spin coater and hot plates (Wesemann / Dekolab) |
FREE |
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12. Fume Hood 2 for Manual Developing and Solvent cleaning (Wesemann / Dekolab) |
FREE |
| Inspection Microscope 1 (Zeiss Axio Lab A1) |
FREE |
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Inspection Microscope 2 for Mask Inspection (Zeiss Axio Scope A1) |
FREE |
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13. Vacuum Oven (MMM Medcenter Vacucell 55) |
FREE |
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14. Fridge for chemicals |
FREE |
| Wet Bench 1 for Piranha cleaning, Photoresist removal/rework, Polymer removal, Quick Dump Rinser (QDR) (Arias) |
₺ 500.00 |
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Wet Bench 2 for RCA cleaning, Diluted HF-last, Buffered oxide etch, QDR (Arias) |
₺ 500.00 |
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15. Desiccator sample storage cabinet |
FREE |
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16. Rinser Dryer Stack for 4” and 6” wafers (OEMGroup SRD 820) |
₺ 500.00 |
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17. HMDS Oven (Suss MicroTec VP8 Vapor Primer) |
B |
₺ 500.00 |
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| Micro Writer Direct-Write Lithography System (Heidelberg Instruments µMLA) |
₺ 1,200.00 |
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UV curing/exposure machine (Uvitron INTELLIRAY 600) |
₺ 500.00 |
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UV-ozone surface treatment system (Novascan PSDP-UV8T) |
₺ 500.00 |
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Profilometer (Dektak XT-S) |
₺ 800.00 |
| Wet Bench 7 for Spin coating, developing, pre-bake and post-bake hot plates (Arias) |
₺ 500.00 |
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Fume Hood 4 for Solvent processes (Wesemann / Dekolab) |
FREE |
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Inspection Microscope (Zeiss Axio Lab A1) |
FREE |
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Fridge for Chemicals |
FREE |
| ICP-CVD for SiO2, Si3N4, SiOxNy, a-Si, SiC deposition (Sentech SI 500 D with Loadlock) |
₺ 1,200.00 |
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Thermal/E-beam Evaporator (KJL PVD 200) |
₺ 1,200.00 |
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Magnetron Sputtering System (KJL PVD 75, with 6 targets and Loadlock) |
₺ 1,200.00 |
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4-point probe and I-V meter (Signatone PRO-4 4000 & Keithley 2450)) |
₺ 500.00 |
| Magnetron Sputtering System for Oxides (KJL PVD 75, with 4 targets) |
₺ 1,200.00 |
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Rapid Thermal Annealer (SSI Solaris 150) |
₺ 800.00 |
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| ICP-RIE Silicon DRIE (Sentech SI 500 C with Cryogenic and Bosch process capability) |
₺ 1,600.00 |
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ICP-RIE Metal (Sentech SI 500 with Metal / Dielectric / SiC / III-V materials etch capability) |
₺ 1,200.00 |
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RIE Silicon & Dielectric (SENTECH Etchlab 200) |
₺ 1,200.00 |
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Plasma Photoresist Asher (Harrick Plasma PDC-002HPCE) |
₺ 800.00 |
| XeF2 Silicon Etch System (MEMS STAR Orbis Alpha Silicon Etch) |
₺ 1,200.00 |
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| Wet Bench 5 for Acid processes with Metal etch, TMAH/KOH etch, heaters, QDR (Arias) |
₺ 500.00 |
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Fume Hood 3 for Solvent Processes (Wesemann / Dekolab) |
FREE |
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HF-Vapor Oxide (Release) Etch System (IDONUS VPE150) |
₺ 800.00 |
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Supercritical CO2 Dryer (Tousimis Autosamdri – 815 B) |
₺ 800.00 |
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| Hot Embossing System (EVG 501 with Anodic Bonding and Imprint Lithography capabilities) |
₺ 1,200.00 |
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Vacuum oven (MMM MEDCENTER Vacucell 55) |
FREE |
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PDMS Mixer (Speedmixer DAC 150.1 FVZ) |
₺ 500.00 |
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Parylene Deposition System (SCS Labcoater PDS 2010E) |
₺ 800.00 |
| Desiccators |
FREE |
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Fume Hood 5 for PDMS and solvent processes (Wesemann / Dekolab) |
FREE |
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Stereo Microscope (Zeiss Stemi 305 Trinoküler) |
FREE |
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Wafer Scriber (OEG MR 2000) |
₺ 500.00 |
| Analytical Scale |
FREE |
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UV Laser Prototyping System (LPKF ProtoLaser U4) |
₺ 800.00 |
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Wire Bonder (Micro Point Pro iBond 5000 Dual, with Wedge and Ball Bond capabilities) |
₺ 800.00 |
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Wafer Dicer (Disco DAD3221) |
₺ 800.00 |
| Contact Angle Meter (Biolin Scientific Attension ThetaLite TL101-Auto1) |
₺ 500.00 |
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Spray Coater |
₺ 800.00 |
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| Scanning Electron Microscope (HITACHI FlexSEM 1000) |
₺ 800.00 |
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Ellipsometer (Sentech SENresearch 4.0 Spectroscopic Ellipsometer SER 800) |
₺ 1,200.00 |
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Profilometer (Dektak XT-A) |
₺ 800.00 |
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Confocal Microscope (Olympus LEXT OLS5000) |
₺ 800.00 |
| Inspection Microscope (Zeiss Axio Imager A2M) |
₺ 800.00 |
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