ICP-RIE-DSE-Bosch-60µm-PWP-ST

Cleanroom is located at SNA building (SNA B182) occupying a 760 m2 ISO Level 5 area that hosts state-of-the-art equipment to produce electronic/optoelectronic components, integrated circuits and micro/nano-electro-mechanical systems. All equipment infrastructure and wet benches are designed to be suitable for processing different samples ranging from small samples up to 6-inch wafer sizes. In a particulate-free and controlled area, the cleanroom offers...